Bloomberg Center houses a class 1000 cleanroom with temperature and humidity control. The cleanroom features contact and projection photolithography equipment, a thermal evaporator and video microscopy capabilities. As of July 1, 2017, the rate to use the clean room is $15 per hour.
Photolithography
Mask Aligner
- Contact photolithography across 3” wafer with 2 micron feature size
- Multiple-mask alignment with 2 micron accuracy
Projection Photolithography
- 0.5 micron feature size
